來源: 華匯儀器 作者: D. Hosner 時間: 2016-10-29 點擊:
1163 次
Zheng, J.Y., Hao, J.Y., Liu, X.Q., Liu, W.M., Properties of TiN/TiCN multilayer films by direct current magnetron sputtering. Journal of Physics D: Applied Physics (45, 9), Article id. 095303, 2012, 9pp.